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Research Assistant
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Office
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Bldg 3 Rm 310
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Telephone
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+86 10 8230 5045
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Fax
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+86 10 8230 5141
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Email
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yfzhu@semi.ac.cn
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Mailing Address
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Engineering Research Center of Semiconductor Integrated Technology，Institute of Semiconductors，Chinese Academy of Sciences，Beijing, P. O. Box 912，100083, P. R. China
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Biosketch
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Ph.D Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China July 2012
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B.S. Department of Physical Science and Technology, Sichuan University, Chengdu, China July 2007
Research Area
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RF MEMS switch
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Reliability of MEMS structures and devices
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Infrared photon detection with MEMS structures
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BioMEMS Resonator
Publications
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Y. F. Zhu, F. X. Zhang, J. L. Yang, et al., “Stability of Mechanical Properties for Sub-Micrometer Single Crystal Silicon Cantilever under Cyclic Load”, J. Microelectromech. Syst., 2011, 20(1): 178-183.
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Y. F Zhu, J. L. Yang, et al., “A new scheme for detecting infrared photon with high sensitivity using microcantilever”, 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, July 8-11, 2012, Nanjing, China.
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L. J. Tang, Y. F. Zhu, J. L. Yang, et al., “Dependence of wet etch rate on d eposition, annealing conditions and etchantsfor PECVD silicon nitride film”, Journal of Semiconductors, 2009, 30(9), 096005.
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F. X. Zhang, Y. F. Zhu, J.L. Yang, et al., “Sensitive detection of infrared photons using a high-Q microcantilever”, Journal of Semiconductors, 2011, 32(9), 094010-4.
Honors & Awards
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The third prize of "9th Youth Forum", Institute of Semiconductors, CAS. June, 2011.
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Honors Excellent Student of Graduate School of Chinese Academy of Sciences, during the Academic Year 2010 – 2011.
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