Biosketch

• 2009.3-  Institute of Semiconductors, Chinese Academy of Sciences, Associate Professor
• 2006.7-2009.3 School of Electronics Engineering and Computer Science, Peking University, Post-Doctor
• 2002.9-2006.7 Chinese Academy of Electronics and Information Technology, Doctor
• 1999.7-2002.9 Department of Materials Science and Engineering, Yunnan University, Lecturer
• 1996.9-1999.7 Department of Physics, Yunnan University, Master
• 1992.9-1996.7 Department of Physics, Yunnan University, Bachelor

Research Area

• Semiconductor materials
• MEMS inertial devices
• MEMS RF devices
• MEMS resonator devices
• MEMS packaging

Publications

1. Xu Mao, Jinling Yang, An Ji, and Fuhua Yang, Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate, J. Microelectromech. Syst., 2012, (Accept), (SCI).
2. Xu Mao, Jinling Yang, An Ji, and Fuhua Yang, Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate, MEMS 2012, Paris, FRANCE, 29 January - 2 February 2012, 337-340 (EI).
3. Xu Mao, Yumin Wei, Zhenchuan Yang, Guizhen Yan, Fabrication of SOI MEMS Inertial Sensorswith Dry Releasing Process, IEEE SENSORS 2009 Conference, 479-482, (EI).
4. Yinfang Zhu, Jinling Yang, Xu Mao, Fuhua Yang, A new scheme for detecting infrared photon with high sensitivity using microcantilever, 6th APCOT, July 8-11, 2012, Nangjing, China. 1-2.
5. Xu Mao, Yingxia Jin, Zhenlai Zhou, Yu Yang, Xinghui Wu and Fuxue Zhang, The Research on Growth Temperature of Ge/Si Thin Films Grown by Magnetron Sputtering, Rare Metal Materials And Engineering 35: 564-566 Suppl. 3, DEC 2006 (SCI).
6. Fuxue Zhang, Xu Mao, Yu Liu, Nan Zhang and Wei Zhang, A Silicon Micromachined Gyroscope Driven By The Rotating Carrier Self, Rare Metal Materials And Engineering 35: 519-521 Suppl. 3, DEC 2006, （SCI）.
7. Yumin Wei, Xu Mao, Zhenchuan Yang, GuiZhen Yan, A single mask dry releasing process for making high aspect ratio SOI MEMS devices, IEEE-NEMS 2010 (EI).
8. Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan, The Method of Prevent Footing Effect in Making SOI Micro-mechanical accelerometer, IEEE-NEMS 2009 (EI).
9. Fuxue Zhang, Xu Mao, Gasflow Style Level Posture Sensor and Angular Velocity Gyroscope Assembled Inertial Sensor, Progress in Natural Science, 17(8), 2007, 971-978 (EI).
10. Fuxue Zhang, Hongwei Wang, Wei Zhang, Xu Mao, Nan Zhang, A Silicon Micromachined Gyroscope Driven by the Rotating Carrier's Angle Velocity, ICIA 2005, 2005, 128-133 (EI).
11. Yu Yang, Xu Mao, Hongning Li, Zhenlai Zhou, Shiji Jiang, Xinghui Wu, Shoujiang Huang, Pengxiang Zhang, Growth of Germanium Crystal Films on Amorphous Silicon by Sputter Depositon, Physical E8(2000) 72-76 (EI).
12. Xu Mao, Yu Liu, Mingqing Ding, Fuxue Zhang, The Performance of A New Silicon Micromachined Gyroscope, (APCOT 2006), Singapore 25-28 June 2006.
13. Xu Mao, Liang Ming, Yu Liu, Fuxue Zhang, A Kind of Shock Resistance Method on Silicon Micro-Machined Gyroscope, Proceedings of the 2006 IEEE, International Conference on Information Acquisition, August 20 - 23, 2006, Weihai, Shandong, China, 101-105.
14. Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan, A SOI MEMS Accelerometer Fabricated with Anti-Footing Technique, Nanotechnology and Precision Engineering,  8, 330-333, 2010, (EI).
15. Xu Mao, Yu Liu, YinNian Wang, Mingqing Ding, Fuxue Zhang, Research on Two dimensional Silicon Micromachined Gyroscope, Piezoelelctectrics & Acoustooptics, 29(3), 298-301,2007 (EI).
16. Xu Mao, Xiangping Zhou, Yong Wang, Yu Yang, The research of bias effect in fabricating Ge/ Si thin f ilm, Journal of Functional Materials, 32(6) ,614-616,2001 (EI).
17. Hongwei Wang, Xu Mao, Wei Zhang, Fuxue Zhang, The Sense Organ of Silicon Micromachined Gyroscope Using for Circumrotation Carrier, Piezoelelctectrics & Acoustooptics, 28（2）, 170－172, 2006 (EI).
18. Fuxue Zhang, Hongwei Wang, Wei Zhang, Xu Mao, Nan Zhang, Silicon Micromachined Gyro Driving by Angular Rate of the Rotating Substrate, Piezoelelctectrics & Acoustooptics, 27(2), 109-117, 2005 (EI).
19. Fuxue Zhang, Xu Mao, Gasflow Style Compensation Loop Sensor, 29（1）, 19-22, 2007 (EI).
20. Xiangping Zhou, Xu Mao, Shubo Zhang, Yu Yang, Raman study on the thermal stabil ity of Ge/ Si multilayers, Journal of Functional Materials, 32(4), 429-433, 2001 (EI).

Research Highlights

Chinese Patents

1. Xu Mao, Jinling Yang, and Fuhua Yang, Low Temperature Au-Sn Intermediate Bonding Technique for Wafer-Level, Application Number: 201010601975.1.
2. Xu Mao, Jinling Yang, and Fuhua Yang, A New Methods To Improve The Lithography Precision, Application Number: 201110344422.7.
3. Xu Mao, Zhiqiang Fang, Jinling Yang, and Fuhua Yang, wafer-level bonding System and device for Low temperature with local heating, Application Number: 201110343625.4.
4. Yinfang Zhu, Weiwei Wei, Xu Mao, Jinling Yang, and Fuhua Yang, A High Speed RF MEMS Switch, Application Number: 201210105187.2.
5. Fuxue Zhang, Xu Mao, A Silicon Micromachined Gyroscope, Application Number: 200410029089.0.
6. Fuxue Zhang, Xu Mao, A Silicon Micromachined Gyroscope Driven by the Rotating Carrier, Application Number: 200410029228.X.
7. Fuxue Zhang, Xu Mao, A Shock Resistance Method of Silicon Micro-Machined Gyroscope, Application Number: 200510134857.3.
8. Fuxue Zhang, Xu Mao, Two dimensional Silicon Micromachined Gyroscope, Application Number: 200510134858.8.

Conference Posters

1. Xu Mao, Jinling Yang, An Ji, and Fuhua Yang, Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate, MEMS 2012, Paris, FRANCE, 29 January - 2 February 2012, 337-340 (EI).
2. Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan, The Method of Prevent Footing Effect in Making SOI Micro-mechanical accelerometer, IEEE-NEMS January 5, 2009 - January 8, 2009 ,Shenzhen, China (EI).
3. Xu Mao, Yumin Wei, Zhenchuan Yang, Guizhen Yan, Fabrication of SOI MEMS Inertial Sensorswith Dry Releasing Process, IEEE SENSORS October 25, 2009 - October 28, 2009, Christchurch, New Zealand (EI).
4. Xu Mao, Yu Liu, Mingqing Ding, Fuxue Zhang, The Performance of A New Silicon Micromachined Gyroscope, (APCOT 2006), Singapore 25-28 June 2006.
5. Xu Mao, Yingxia Jin, Zhenlai Zhou, Yu Yang, Xinghui Wu and Fuxue Zhang, The Research on Growth Temperature of Ge/Si Thin Films Grown by Magnetron Sputtering , The 6th East Asia Conference on Chemical Sensors, Nov.6-9, 2005, Guilin, China (SCI).

Honors & Awards

“Thin-film Theoretical and Experimental on Si Substrate”,  Yunnan Provincial Science and Technology Third Prize Award.