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Position:Associate professor
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Office
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Bldg 3 Rm 308
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Telephone
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+86 10 8230 5403
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Fax
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+86 10 8230 5141
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Email
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wangxiaofeng@semi.ac.cn
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Mailing Address
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Engineering Research Center of Semiconductor Integrated Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing, P. O. Box 912,100083, P. R. China
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Biosketch
Education background:
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2001-2004, Peking University,Doctor,Microelectronics and solid state electronics
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1998-2001, Beijing Jiaotong University, master,Optoelectronics
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1994-1998, Shandong University,Bachelor,Microelectronics
Working experience:
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2004.12-2008.5, Korea, Suwon, Samsung semiconductor research institute, senior engineer
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2008.5-now, Institute of semiconductor, CAS, Associate professor
Research Area
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Semiconductor memory, process and devcie
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Nanoelectroincs
Publications
Thesis:
1、Jiayong Zhang, Xiaofeng Wang, et al,Selective and lithography-independent fabrication of 20 nm nano-gap electrodes and nano-channels for nanoelectrofluidics applications,Nanotechnology 21 (2010) 075303
2、Jiayong Zhang, Xiaofeng Wang, et al,Fully lithography independent fabrication of nanogap electrodes for lateral phase-change random access memory application,APPLIED PHYSICS LETTERS 96, 213505 2010
3、Huili Ma, Xiaofeng Wang, et al, A self-aligned process for phase-change material nanowire confined within metal electrode nanogap, APPLIED PHYSICS LETTERS 99, 173107, 2011
4、Yingchun Fu, Xiaofeng Wang, et al, A lithography-independent and fully confined fabrication process of phase-change materials in metal electrode nanogap with 16-μA
threshold current and 80-mV SET voltage, Appl Phys A,
5、Yingchun Fu, Xiaofeng Wang,et al, A Self-Aligned Process to Fabricate Metal Electrode-Quantum Dot/Nanowire-Metal Electrode Structure with 100% Yield,CHIN. PHYS. LETT. Vol. 29, No. 9 (2012) 098102
Research Highlights
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Developed a Lithography-independent method to fabricate as small as 17nm metal nanogap.
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Developed a self-aligned process by which functional materials NW/quantum dot can be fabricated within metal electrode nanogap.
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Using the above method, threshold current of PCRAM as small as 160nA is obtained.
Honors & Awards