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assistant professor
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Office
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Bldg 1 Rm 512
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Telephone
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+86 10 8230 4354
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Fax
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+86 10 8230 5141
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Email
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yuanquan@semi.ac.cn
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Mailing Address
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Engineering Research Center of Semiconductor Integrated Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing, P. O. Box 912,100083, P. R. China
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Biosketch
2007.9-2012.9 Master-doctor continuous study on Micro-electro-mechanical systems (MEMS), Microelectronics Department of Peking University
2008.9-2008.11 Exchange student, School of Life Sciences, University of California, Davis (UC Davis)
2002.9-2006.6 Bachelor of Electronic science and technology, School of Information Engineering, Northwestern Polytechnical University
Research Area
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Design and microfabrication of RF MEMS devices
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Biological implantable energy telemetry system
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High-performance MEMS micro-magnets integrate technology
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Electromagnetic MEMS energy harvesting system
Publications
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Xuming Sun, Quan Yuan(co-first author), Dongming Fang, Haixia Zhang*, Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators, Sensors & Actuators A, Available online 20 January 2012(SCI/EI)
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Xiuhan Li, Quan Yuan, Tianyang Yang, Jian Liu and Haixia Zhang*, Magnetic Energy Coupling System Based on MEMS Coils,Journal of Applied Physics, Accepted.(SCI/EI)
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Dongming Fang, Xiuhan Li, Quan Yuan, Haixia Zhang*, Design, simulation and characterization of variable inductor with electrostatic actuation fabricated by using surface micromachining technology, IEEE Transactions on Electron Devices, p2751 – 2755, Oct, 2010(SCI/EI)
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Dongming Fang, Xiuhan Li, Quan Yuan, Haixia Zhang*, Surface micromachined tunable inductor with ‘magnetic core’ of electroplated Ni80Fe20 alloy, Journal of Micro-Nanolithography MEMS and MOEMS, Submitted.
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Dongming Fang, Xiuhan Li, Quan Yuan, Xuming Sun, Haixia Zhang*, Integrated tunable LC band pass filter, Microelectronics International, Submitted.
Research Highlights
Chinese Patents
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Quan Yuan, Dongming Fang, Haixia Zhang, Micro electromagnetic energy harvester and fabrication process, patent No.: ZL200910080541
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Dongming Fang, Quan Yuan, Jian Liu, Haixia Zhang, electrostatic-driven film based tunable MEMS inducto and fabrication method, patent No.: ZL200910080540.4
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Xiuhan Li, Li Yin, Dan Li, Quan Yuan, Haixia Zhang, RF wireless power and signal transmission test platform, Publication Number: CN101697501A
US Patents
[1] Quan Yuan,Dong Hou, Haipeng Guo, TOPOGRAPHY RECORDING TECHNIQUES, United States Patent Application:US20120022790A1
Conference Posters
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Quan Yuan, Xuming Sun, Choong Hoe Low, Dongming Fang, Haixia Zhang*, Electromagnetic energy harvester fabricated with electrodeposition process, in: Proceedings of Power MEMS 2010, Leuven, Belgium, Nov 30–Dec 3, 2010 (EI)
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Xuming Sun, Quan Yuan, Dongming Fang, Haixia Zhang*, Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS applications, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, p 1392-1395, 2011(EI)
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Quan Yuan, Dongming Fang, Xiuhan Li, Haixia Zhang*, Electrodeposition of CoNiMnP-based Permanent Magnetic Film, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, p 883-886, 2010(EI)
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Xuming Sun, Quan Yuan, Dongming Fang, Haixia Zhang*, Electrodeposition and Characterization of CoNiMnP-based Permanent Magnetic Film for MEMS Applications, 6th NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, p 367-371, 2011 (EI)
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Xiuhan Li, Quan Yuan, Leijie Lang, Jian Liu, Yu Liu, Dongming Fang, Haixia Zhang*, Analysis and modeling of thermal failure based on a MEMS thermally driven structure, Proceedings of SPIE - The International Society for Optical Engineering, v 7510, 2009 (EI)
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Xiuhan Li, Li Yin, Zilu Wang, Quan Yuan, Dongming Fang, Haixia Zhang*, High efficiency coupling with stacked MEMS coils, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, p 509-512, 2010, 2010 (EI)
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Yue Chen, Xiuhan Li, Dongming Fang, Quan Yuan, Haixia Zhang*, Spiral capacitor based on copper electroplating, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, p 432-435, 2009 (EI)
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Xuming Sun, Yang Zheng, Zhongliang Li, Miao Yu, Quan Yuan, Xiuhan Li, Haixia Zhang*, Design and Fabrication of Flexible Parylene-based Inductors with Electroplated NiFe Magnetic Core for Wireless Power Transmission System, NEMS 2012 -7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,312-316(EI)
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Dan Li, Xiuhan Li, Shiqing Chen, Quan Yuan, Haixia Zhang, Study of RF power attenuation with MEMS coils, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, p 609-612, 2008 (EI)
Conference Presentations
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Shuaipeng Wang, Shungao Ying, Jingjing Wang, Quan Yuan, Xu Mao, Jingling Yang, Fuhua Yang, A Novel Device for Detecting Cancer Markers with High Accuracy, The 3rd Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2012),Shanghai
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Quan Yuan, Xuming Sun, Shouhe Zhang, Haixia Zhang, A novel integrate MEMS energy harvester, The 2nd Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2011), Jeju, Korea.
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Quan Yuan, Xuming Sun, Dongming Fang, Haixia Zhang*, Design and microfabrication of integrated magnetic MEMS energy harvester for low frequency application, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, p 1855-1858, 2011(EI)
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Quan Yuan, Xuming Sun, Ruoxi Jia and Shouhe Zhang, Haixia Zhang*, Three Dimensional Vibration Energy Harvester with Integrated Frequency Up-Conversion Magnet Array for low frequency Application, IEEE CAS FEST 2012, May 20, 2012, Seoul, Korea, (Invited talk) (EI)
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Quan Yuan, Xiuhan Li, Dan Li, Haixia Zhang*, Development of rf power attenuation model with MEMS coils, 2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008, p 69-72, 2008(EI)
Honors & Awards
2010-2011, Pivot of Merit Student of the Peking University
2010-2011, Merit Student of the Peking University
2009-2010, "Founder" scholarship of Peking University
2009-2010, “MEMSIC” scholarship
2009-2010, Merit Student of the Peking University
2009, Nano training certificate, Asian Nano Forum
2009, The “MEMSIC Cup” Electronic Design Competition second prize award
2009, The excellent Youth League instructor, Peking University, Outstanding Youth League members, Peking University
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