Biosketch

• 2003 to present, Institute of Semiconductors, Chinese academy of Sciences, Performed research work including novel microelectronic devices and MEMS (micro-electro-mechanics system) devices.
• Ph.D Microelectronics and solid state electronics, Institute of Semiconductors, Chinese academy of Sciences, Beijing, China July 2003
• M.S. Physics electronics, Institute of Physics, China academy of space technology, Lanzhou, China, July 2000
• B.S. Department of electronic engineering, Zhengzhou University, Zhengzhou, China July 1995

Research Area

• RF MEMS devices and system based on resonant mechanism
• MEMS gyroscope
• SiC devices

Technology Service Area

• Fabrication of Si and SOI MEMS devices
• I-V, C-V measurements

Publications

1. Kang Zhongbo, Han Guowei, Si Chaowei, Zhong Weiwei, Zhao Yongmei, NingJin, “Fabrication of the RF MEMS Filter Based on Resonance”, Micronanoelectronic Technology, Vol49., No.7, July. , 2012, pp467-470
2. Chaowei Si,  Guowei Han,  Jin Ning, Weiwei Zhong,  Fuhua Yang., “Quality factor optimization techniques for MEMS gyroscopes of frame structures ”. Advanced Materials Research, Vol 590 (2012) 
3. G.W. Han, C.W. Si, J. Ning, W.W. Zhong, Y.M. Zhao, G.S. Sun, F.H. Yang, "Feed-through cancellation of MEMS filter using difference method and analysis of the induced notch", JOURNAL OF SEMICONDUCTORS, accepted.
4. Zhao Yongmei, Sun Guosheng, Ning Jin, Liu Xingfang, Zhao Wanshun, Wanglei, Li Jinmin , “Doped Polycrystalline 3C-SiC Films Deposited by LPCVD for Radio-Frequency MEMS Applications”, Chinese Physics Letters, 2008, Vol.25, No.6, PP.2269-2272
5. Wangliang, Zhao Yongmei, Ning Jin, Sun Guosheng, Wanglei, Liu Xingfang, Zhao Wanshun, Zeng Yiping, and Li Jinmin, “Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures”, JOURNAL OF SEMICONDUCTORS, Vol.29, No.8, Aug., 2008, pp1453-1456

Research Highlights

Chinese Patents

1. Si Chaowei, Han Guowei, Ning Jin, Liu Xiaodong, Temperature compensated high precision MEMS Oscillitor by paracitical capacitor,  Assignees: Institute of semiconductors, CAS, Patent application No. 201210051847.3
2. Ning Jin, Li Yongmei, Han Guowei, Yang Fuhua, MEMS filter modular base on resonant mechanism, Assignees: Institute of semiconductors, CAS, Patent application No. 201010534603.1
3. Wang Liang, Ning Jin, Sun Guosheng, Wang Lei, Zhao Wanshun, Zhao Yongmei, Liu Xingfang, Fabrication and Structure of poly cubic SiC MEMS resonator,  Assignees: Institute of semiconductors, CAS, Patent No. ZL.200710178327.8

Conference

1. Yongmei Zhao, Jin Ning, Guosheng Sun, Xingfang Liu, Liang Wangk, Gang Ji, Lei Wang, Wanshun Zhao, Jinmin Li, Fuhua Yang, “Simulation and fabrication of the SiC-based clamped-clamped filter”, 2008, 9th International Conference on Solid-State and Integrated-Circuit Technology, pp2532-2535
2. Chaowei Si, Guowei Han, Jin Ning, Weiwei Zhong, Fuhua Yang. “Design of a MEMS resonant wind sensor on airplane wing”. 3rd International Conference of the Chinese Society of Micro-Nano Technology, Hangzhou, China, Nov., 2012 
3. G.W. Han, C.W. Si, J. Ning, Y.M. Zhao, G.S. Sun, F.H. Yang,"Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram", 2nd Micro Nano Devices, Structure and Computing Systems, accepted (2013).