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associate professor
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Office
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Bldg 3 Rm 308
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Telephone
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+86 10 8230 5405
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Fax
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+86 10 8230 5141
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Email
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zcfan@semi.ac.cn
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Mailing Address
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Engineering Research Center of Semiconductor Integrated Technology，Institute of Semiconductors，Chinese Academy of Sciences，Beijing, P. O. Box 912，100083, P. R. China
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Biosketch
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Ph.D Institute of semiconductors, CAS , Beijing, China July 2004
Research Area
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Research and application of ICP etching
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Integration of SPP and SOI waveguide
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Wide band gap semiconductor power electronics device
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Patterned Sapphire Substrate
Publications
1、Yu, Hejun, Yu, Jinzhong, Fan, Zhongchao, Chen, Shaowu, “Realization of an ultracompact low-loss photonic crystal corner mirror ”IEEE Photonics Technology Letters, (2007)
2、Chen, Xi, Fan, Zhong-Chao, Xu, Yun, Song, Guo-Feng, Chen, Liang-Hui “Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection” MICROELECTRONIC ENGINEERING, (2011)
