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Position：Processsing Engineer
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Office
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Bldg 3 Rm 310
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Telephone
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+86 10 8230 4478
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Fax
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+86 10 8230 5141
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Email
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changchun@semi.ac.cn
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Mailing Address
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Engineering Research Center of Semiconductor Integrated Technology
Institute of Semiconductors
Chinese Academy of Sciences
Beijing 100083, P. R. China
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Biosketch
M.E Harbin University of Science and Technology Materials Science
B.E Harbin University of Science and Technology Communication Engineering
Research Area
PECVD FOR SiO2, SIN, SINO
AOE FOR SiO2, SIN, SINO, SIC
ICP FOR SI
