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Characteristics of polysilicon resonant microbeams [2011-09-23] |
Characteristics of polysilicon resonant microbeams
作者 J.D. Zook, D.W. Burns, H. Guckel, J.J. Sniegowski1, R.L. Engelstad, Z. Feng
期刊 Sensors and Actuators A: Physical Volume 35, Issue 1, October 1992, Pages 51-59
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