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Uniformity studies of inductively coupled plasma etching in fabrication of [2009-07-23] |
| Uniformity studies of inductively coupled plasma etching in fabrication of HgCdTe detector arrays R. Bommena, S. Velicu, P. Boieriu, T. S. Lee, C. H. Grein, and K. K. Tedjojuwono Proc. SPIE Vol. 6542, 65420J (May. 14, 2007) 附件下载 |
