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Regrowth of 3C-SiC on CMP treated 3C-SiC/Si Epitaxial Layers [2011-11-03] |
Regrowth of 3C-SiC on CMP treated 3C-SiC/Si Epitaxial Layers
H. Mank, C. Moisson, D. Turover, Mark Twigg and Stephen E. Saddow
Materials Science Forum Vols. 483-485 (2005) pp. 197-2005
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