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Measurement of Leak Rate for MEMS Vacuum Packaging [2009-11-30] |
| Measurement of Leak Rate for MEMS Vacuum Packaging 作者: Gan ZY (Gan, Zhiyin)1,2, Huang DX (Huang, Dexiu)1,3, Wang XF (Wang, Xuefang)1,2, Lin D (Lin, Dong)1,2, Liu S (Liu, Sheng)1,2,3 来源出版物: JOURNAL OF ELECTRONIC PACKAGING 卷: 131 期: 4 文献编号: 041001 出版年: DEC 2009 附件下载 |
