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Fabrication of Si nano-wires using anisotropic dry and wet etching [2010-02-03] |
| Fabrication of Si nano-wires using anisotropic dry and wet etching 作者: Normand P, Tsoukalas D, Aidinis C, Tserepi A, Kouvatsos D, Kapetanakis E 来源出版物: MICROELECTRONIC ENGINEERING 卷: 42 页: 551-554 出版年: MAR 1998 附件下载 |
