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Effect of H2 annealing on oxide integrity improvement [2010-01-08] |
| Effect of H2 annealing on oxide integrity improvement 作者: Park, J.-G.; Rozgonyi, G.A.; Ushio, S.; Cho, K.-C.; Lee, C.-S. 来源出版物: Proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. ULSI Science and Technology / 1995 页:444-56 出版年: 1995 附件下载 |
