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Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF S [2010-03-22] |
| Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions Solid State Phenomena (Volume 134) Volume Ultra Clean Processing of Semiconductor Surfaces VIII Edited by Paul Mertens, Marc Meuris and Marc Heyns Pages 87-90 DOI 10.4028/www.scientific.net/SSP.134.87 附件下载 |
