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Down to 2 nm Ultra Shallow Junctions : Fabrication by IBS Plasma Immersion [2010-09-01] |
| Down to 2 nm Ultra Shallow Junctions : Fabrication by IBS Plasma Immersion Ion Implantation Prototype PULSION? AIP Conf. Proc. -- November 13, 2006 -- Volume 866, pp. 609-613 ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006; doi:10.1063/1.2401591 Frank Torregrosa, Hasnaa Etienne, Gilles Mathieu, and Laurent Roux 附件下载 |
