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High quality Ge virtual substrates on Si wafers with standard STI patternin
[2012-05-23]

High quality Ge virtual substrates on Si wafers with standard STI patterning
Loo R, Wang G, Souriau L, Lin JC, Takeuchi S, Brammertz G, et al. J Electrochem
Soc 2010;157:H13.


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