Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation
Marc Sulfridge;Taher Saif;Norman Miller;分类号：T-53 ; 总页数：4 ; 会议时间：2002 ; 会议名称：2002 ASME International Mechanical Engineering Congress and Exposition (IMECE 2002) ; 会议地点：New Orleans, Louisiana, USA