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On the Influence of the Position-Dependence of Stress on Device Performance
[2010-06-13]
On the Influence of the Position-Dependence of Stress on Device Performance
pp. 439-442
210th ECS Meeting
Volume 3, Issue 7 -  October 29-November 3, 2006 , Cancun, Mexico
SiGe and Ge: Materials, Processing, and Devices
Editor(s): D. Harame, J. Boquet, M. Caymax, J. Cressler, H. Iwai, S. Koester, G. Masini, J. Murota, A. Reznicek, K. Rim, B. Tillack, S. Zaima
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