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Effects of different defect types on the performance of devices fabricated
[2010-05-27]
标题: Effects of different defect types on the performance of devices fabricated on a 4H-SiC homoepitaxial layer
作者: Chen, H; Raghothamachar, B; Vetter, W, et al.
会议信息: Symposium on Silicon Carbide-Materials, Processing and Devices held at the 2006 MRS Spring Meeting, 日期: APR 18-20, 2006 San Francisco CA
来源出版物: Silicon Carbide 2006 - Materials, Processing and Devices   卷: 911   页: 169-174   出版年: 2006

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