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Structure, chemistry, and electrical performance of silicon oxide-nitride-o [2010-05-11] |
| Structure, chemistry, and electrical performance of silicon oxide-nitride-oxide stacks on silicon Levin, I; Kovler, M; Roizin, Y, et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY 卷: 151 期: 12 页: G833-G838 出版年: 2004 附件下载 |
