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Research progress in the relationship between packaging structures and service performance of MEMS inertial sensors [2026-05-22] |
| Liu Z, Yang X, Jia Y, Zhang Y, Pang Y and Huang X (2025) Research progress in the relationship between packaging structures and service performance of MEMS inertial sensors. Front. Mater. 12:1655566. doi: 10.3389/fmats.2025.1655566 Research_progress_in_the_relationship_between_packaging_structures_and_service_performance_of_MEMS_inertial_sensors.pdf |
