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An extended Stoney's formula including nonlinear deformation for large size wafer of multilayers with arbitrary thicknesses
[2026-04-21]

Authors: Mengda Li, Jiejun Wu, Jinmi He, Nanliu Liu, Tong Han, Guoyi Zhang, Tongjun Yu

Publication: Scripta Materialia, Volume 186, September 2020, Pages 29-32

https://doi.org/10.1016/j.scriptamat.2020.04.006


An_extended_Stoney's_formula_including_nonlinear_deformation_for_large_size_wafer_of_multilayers_with_arbitrary_thicknesses.pdf