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Investigating GaSb(001) Dry Etching by ICP-RIE on a non-Silicon Containing Sample Holder with no Organic Gases [2025-05-13] |
| Investigating GaSb(001) Dry Etching by ICP-RIE on a non-Silicon Containing Sample Holder with no Organic Gases Published online by Cambridge University Press: 18 April 2012
https://resolve.cambridge.org/core/journals/mrs-online-proceedings-library-archive/article/abs/investigating-gasb001-dry-etching-by-icprie-on-a-nonsilicon-containing-sample-holder-with-no-organic-gases/6B6E9AA56A5A9B355DCD99E14410EA85 Investigating_GaSb(001)_Dry_Etching_by_ICP-RIE_on_a_non-Silicon_Containing_Sample_Holder_with_no_Organic_Gases.pdf |
