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Low temperature bonding of heterogeneous materials using Al2O3 as an intermediate layer [2024-10-16] |
| Hitesh Kumar Sahoo; Luisa Ottaviano; Yi Zheng; Ole Hansen; Kresten Yvind J. Vac. Sci. Technol. B 36, 011202 (2018) https://doi.org/10.1116/1.5005591 3cb679e04425870.pdf |
