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Pulsed high-density plasmas for advanced dry etching processes [2024-10-09] |
| Samer Banna; Ankur Agarwal; Gilles Cunge; Maxime Darnon; Erwine Pargon; Olivier Joubert Journal of Vacuum Science & Technology A, 30, 040801 (2012) Pulsed_high-density_plasmas_for_advanced_dry_etching_processes.pdf |
