Journal of Vacuum Science and Technology B

RESEARCH ARTICLE | JULY 18 2024 

Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness 

Special Collection: Papers from the 67th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2024) 

Naoki Takano ; Hiromasa Niinomi ; Tomoya Oshikiri ; Masaru Nakagawa