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序号
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第一作者
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题 目
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论文期刊
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杨晋玲
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Fracture properties of LPCVD silicon nitride and thermally grown silicon oxide thin films from the load-deflection of long Si3N4 and SiO2/Si3N4 diaphrams
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IEEE J. Microelectromech. Syst. 17 (5): 1120–1134 (2008)
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杨晋玲
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Fracture properties of thermal silicon oxide thin films from the load-deflection of long SiNx’/SiO2 membranes
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IEEE Review on Advances in Micro, Nano and Molecular System, 1: 621-625 (2006)
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杨晋玲
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Miniaturized single-crystal silicon cantilevers for scanning force microscopy
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Appl. Phys. Lett. 86 (13): 134101-1–134101-3 (2005)
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C. Leung, A. Bestembayeva, J. L. Yang,
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Atomic force microscopy with nano-scale cantilevers resolves different structural conformations of the DNA double helix
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Nano Lett. 12, 3846 (2012)
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刘雯
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Surface plasmon enhanced GaAs thin film solar cells
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Sol. Energy Mater. Sol. Cells, 95, 693, (2011)
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刘雯
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Long-range-ordered Ag nanodot arrays grown on GaAs substrate using nanoporous alumina mask
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Mater. Sci. Semicond. Process (accepted)
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张加勇
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Fully lithography independent fabrication of nanogap electrodes for lateral phase-change random access memory application
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Applied Physics Letters 96, 213505 2010
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马慧莉
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Self-aligned process for phase-change material nanowire confined within electrode nanogap
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Applied Physics Letters 99 (2011) 173107
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刘云飞
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An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices
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J. Micromech. Microeng. 22, 035003 (2012)
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刘云飞
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An effective approach for restraining galvanic corrosion of polycrystalline silicon by hydrofluoric-acid-based solutions
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IEEE J. Microelectromech. Syst. 20 (2) : 460–465 (2011)
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朱银芳
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Stability of mechanical properties for submicrometer single-crystal silicon cantilever under cyclic load
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IEEE J. Microelectromech. Syst. 20 (1): 178–183 (2011)
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张严波
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Experimental Study on the Subthreshold Swing of Silicon Nanowire Transistors
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Journal of Nanoscience and Nanotechnology10(11), p.7113-7116 2010
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张严波
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Low-Temperature Performance of Accumulation-Mode p-Channel Wrap-Gated FinFETs
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Journal of Nanoscience and Nanotechnology, Vol. 12, 1–4, 2012
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张加勇
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Selective and lithography-independent fabrication of 20 nm nano-gap electrodes and nano-channels for nanoelectrofluidics applications
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Nanotechnology 21 (2010) 075303
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张加勇
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Understanding of Thermal Engineering for Vertical Nanowire Phase-Change Random Access Memory Partially Wrapped by Low-conductivity Layer
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Japanese Journal of Applied Physics 51 (2012) 024302
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杜彦东
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T-shaped gate AlGaN/GaN HEMTs fabricated by femtosecond laser lithography without ablation
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Applied Physics A (2012) 106:575–579
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杜彦东
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Femtosecond laser lithography technique for submicron T-gate fabrication on positive photoresist
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Optical Engineering Vol. 51, No. 05, 2012.
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徐锐
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Dielectric layer-dependent surface plasmon effect of metallic nanoparticles on silicon substrate
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Chinese Phys. B,
21, 025202, (2012)
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徐锐
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Optimization of the dielectric layer thickness for surface plasmon induced light absorption for silicon solar cells
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Jpn. J. Appl. Phys.,
51 (2012) 042301
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徐锐
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Efficiency improvement in solar cells using plasmonic nanoparticle and antireflection film
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Optics Express,
20 (2012) 5601
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李越强
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Observation of N-Shaped Negative Differential Resistance in GaAs-Based Modulation-Doped Field Effect Transistor with InAs Quantum Dots
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Jpn. J. Appl. Phys.,
49, 104002, (2010)
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李越强
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Optically induced current
oscillation in a modulation-dopedfield-effect transistor embedded with InAs quantum dots
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Physica E.,
44 (2011) 686
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周威
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Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films
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Thin Solid Films 517 (6): 1989–1994 (2009)
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周威
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Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane
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IEEE J. Microelectromech. Syst. 17 (2): 453–461 (2008)
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毛旭
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Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate
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J. Microelectromech. Syst.,2012, (Accept)
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毛 旭
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The Research on Growth Temperature of Ge/Si Thin Films Grown by Magnetron Sputtering
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Rare Metal Materials And Engineering 35: 564-566 Suppl. 3, DEC 2006
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赵晖
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Improvement of fabrication and characterization methods for micromechanical disk resonators
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Chin. Phys. B 21, (2012)
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付英春
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A Self-Aligned Process to Fabricate a Metal Electrode-Quantum
Dot/Nanowire-Metal Electrode Structure with 100% Yield
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CHIN. PHYS. LETT. Vol. 29, No. 9 (2012) 098102
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徐晓娜
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Double-peak N-shaped Negative Differential Resistance in a Quantum Dot Field Effect Transistor
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Chin. Phys. Lett.
29, 087303, (2012)
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韩伟华
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Detection of Terahertz photon by GaAs-based single electron transistor at low temperatures
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Journal of Semiconductors, 28(4), pp. 500-506,2007.
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颜伟
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Analysis on ohmic contact of Ti/Al/Ni/Au to AlGaN/GaN HEMT by multi-step annealing process
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Journal of Semiconductors, Vol33, No.6, 2012
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王颖
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An efficient dose-compensation method for proximity effect correction
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Journal of Semiconductors, 2010, 31(8): p.086001
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张杨
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Reduction of proximity effect in fabricating nanometer-spaced nanopillars by two-step exposure
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Journal of Semiconductors, Vol. 30, No. 11, 2009,p.116001
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张严波
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On the drive current of accumulation-mode p-channel SOI based wrap-gated Fin-FETs
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Journal of Semiconductors, 32(3),094001, 2011.
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李艳
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Lithography-independent and large scale fabrication of a metal electrode nanogap
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Journal of Semiconductors,
2009,096003
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程凯芳
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Simple and low-cost fabrication of a metal nanoplug on various substrates by electroless deposition
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Journal of Semiconductors 2011, 32(4): 046001
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杨香
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Fabrication of Silicon Crystal-Facet-Dependent Nanostructures by Electron-Beam Lithography
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Journal of Semiconductors, 29(6),2008,p15-19.
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张逢新
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Sensitive detection of infrared photons using a high-Q microcantilever
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Journal of Semiconductors 32: 094010–094013 (2011)
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解静
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Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications
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Journal of Semiconductors 30 (8): 083003 (2009)
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唐龙娟
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Dependence of wet etch rate on deposition, annealing conditions and etchants for PECVD silicon nitride film
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Journal of Semiconductors 30 (9):096005 (2009)
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赵永梅
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Heteroepitaxial Growth of 3C-SiC Films on Maskless Patterned Silicon Substrates
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Journal of Semiconductors, 29, 1254（2008）
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王亮
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Laterally electrostatically driven poly 3C-SiC folded-beam resonant microstructures
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Journal of Semiconductors, 29, 1453-1456, (2008)
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刘雯
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Optimization of grid design for solar cells
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Journal of Semiconductors, 31, 014006, (2010)
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韩国威
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Feed-through cancellation of MEMS filter using difference method and analysis of the induced notch
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Journal of Semiconductors, accepted
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司朝伟
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Quality factor optimization
techniques for MEMS
gyroscopes of frame structures
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Advanced Materials
Research, 590 (2012)
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赵永梅
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Fabrication and characterisation of polysilicon-based clamped-clamped filter
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Key Engineering Materials, 483, 112 (2011)
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张杨
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Fabrication of nanoscale
metallic air-bridges by introducing a SiO2 sacricial layer.
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Materials Science
in Semiconductor Processing, 2007; 10: 194-199
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韩伟华
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微纳加工技术在光电子领域的应用
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物理, 35卷, 1期, 51 -54页. 2006年
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杜彦东
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增强型AlGaN/GaN HEMT器件工艺的研究进展
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半导体技术, 36(10), p771-777, 2011
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张严波
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硅纳米线场效应晶体管的研究进展
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《微纳电子技术》46卷11期，2009年11月，pp.641-648
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陈燕坤
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硅基太阳能电池的表面纳米织构及制备
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微纳电子技术, 49(6), p.388-395, 2012.
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陈燕坤
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突破衍射极限的表面等离子体激元
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光电技术应用, 26(4), pp.39-44,2011
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李小明
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纳米MOSFET的多栅结构和应变硅纳米线结构
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微纳电子技术,48(11), p.689-696, 2011
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颜伟
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AlGaN/GaN HEMT器件工艺的研究进展
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微纳电子技术, 48(2), p.79-86, 2011
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熊莹
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一种脉冲编码CMOS神经元电路的设计与实现
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电子器件, 34(3), p286-291,2011
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张杨
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硅基单电子晶体管的制备,
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微纳电子技术, 43卷, 2期, 73 -77页 2006年
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付英春
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侧墙技术在相变存储器中的应用
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微纳电子技术, 49卷,5期, 328 -335页 2012年
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毛旭
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采用防Footing工艺加工的SOI 微加速度计
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纳米技术与精密工程 8, 330-333 , 2010
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毛旭
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二维硅微机械陀螺的研究
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压电与声光，29（3），298-301，2007
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毛旭
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Ge/Si薄膜材料生长的偏压效应研究
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功能材料32(6) ，614-616，2001
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宁瑾
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4H-SiC MESFET器件的制备与性能
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半导体学报，第28卷增刊，385 (2007)
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王亮
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Si基SiC 微通道及其制备工艺
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微纳电子技术， 45, 458（2008）
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康中波
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基于谐振原理的RF MEMS滤波器的研制
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微纳电子技术，49，2012, 467（2012）
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杨挺
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立方相SiC MEMS器件研究进展
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微纳电子技术，47, 415（2010）
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李越强
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内嵌InAs量子点的场效应晶体管特性研究
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功能材料与器件学报
16，12345(2010)
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王晓东
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高效多结太阳能电池技术及研究现状
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半导体制造，2008年第10月期
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宋亮
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基于LT3496的可调光大功率LED照明
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电源技术
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宋亮
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光伏电池MPPT扰动观察法的研究现状
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半导体光电
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