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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication [2022-04-25] |
| Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication Editor(s): Prosenjit Rai-Choudhury Published: 1997 |
