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Heteroepitaxy of III-V Compound Semiconductors on Silicon for Logic Applications [2015-01-15] |
| Heteroepitaxy of III-V Compound Semiconductors on Silicon for Logic Applications: Selective Area Epitaxy in Shallow Trench Isolation Structures vs. Direct Epitaxy Mediated by Strain Relaxed Buffers ECS Trans. , vol. 50, pp. 349, 2012. 15141310881.pdf 15141310881.pdf |
