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The Growth and Etching of Si through Windows in SiO2 [2014-12-25] |
| The Growth and Etching of Si through Windows in SiO2 W. G. Oldham and R. Holmstroma doi: 10.1149/1.2426601 J. Electrochem. Soc. 1967 volume 114, issue 4, 381-388 25162548847.pdf 25162548847.pdf |
