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Noncontact, in-line measurement of boron concentration from ultrathin boron-doped epitaxial Si1–xGex layers on Si (100) by multiwavelength micro-Raman spectroscopy [2014-10-24] |
| Yu Fen Tzeng, Scott Ku, Stock Chang, Chi Ming Yang, Chyi Shieng Chern, et al. "Noncontact, in-line measurement of boron concentration from ultrathin boron-doped epitaxial Si1–xGex layers on Si (100) by multiwavelength micro-Raman spectroscopy." Journal of Materials Research 26.06 (2011): 739-744.
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