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Low Defect Density Bulk AlN Substrates for High Performance Electronics and Optoelectronics
[2014-09-17]
Low Defect Density Bulk AlN Substrates for High Performance Electronics and Optoelectronics
Science Forum (Volumes 717 - 720) 
Main Theme Silicon Carbide and Related Materials 2011 
Chapter Chapter 7:
Edited by Robert P. Devaty, Michael Dudley, T. Paul Chow and Philip G. Neudeck
Pages 1287-1290
DOI 10.4028/www.scientific.net/MSF.717-720.1287
1794736695.pdf
1794736695.pdf