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THE FABRICATION AND USE OF MICROMACHINED CORRUGATED SILICON DIAPHRAGMS [2011-04-08] |
| THE FABRICATION AND USE OF MICROMACHINED CORRUGATED SILICON DIAPHRAGMS JERMAN, JH 5TH INTERNATIONAL CONF ON SOLID-STATE SENSORS AND ACTUATORS AND EUROSENSORS 3, JUN 25-30, 1989 MONTREUX SWITZERLAND SENSORS AND ACTUATORS A-PHYSICAL 卷: 23 期: 1-3 页: 988-992 出版年: 1990 附件下载 |
