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Characterizing Metallization Introduced Polysilicon Corrosion of Surface Mi [2010-03-24] |
| 标题: Characterizing Metallization Introduced Polysilicon Corrosion of Surface Micromachined Structures with Submicron Capacitive Gap 作者: Wang, YD; Cai, M; Wang, Y, et al. 会议信息: 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, 日期: JUN 03-05, 2008 Kowloon PEOPLES R CHINA 来源出版物: MICRONANO2008-2ND INTERNATIONAL CONFERENCE ON INTEGRATION AND COMMERCIALIZATION OF MICRO AND NANOSYSTEMS, PROCEEDINGS 页: 51-54 出版年:2008 附件下载 |
