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Galvanic corrosion of miniaturized polysilicon structures morphological, el [2010-03-22] |
| 标题: Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects 作者: Miller, DC; Gall, K; Stoldt, CR 来源出版物: ELECTROCHEMICAL AND SOLID STATE LETTERS 卷: 8 期: 9 页: G223-G226 出版年: 2005 附件下载 |
