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Temperature Dependence on Fatigue Life of Single-Crystal Silicon in Electro [2010-04-07] |
| 【正题名】:Temperature Dependence on Fatigue Life of Single-Crystal Silicon in Electrostatic-Force Actuated Micro Resonator 【个人作者姓名】:Daisuke Goto; Mitsuhiro Tanaka; Takahiro Namazu; Shozo Inoue 【会议录\文集名】:25th Sensor Symposium on Sensors, Micromachines, and Applied Systems 【出版年】:2008 【页码】:p.539-542 【会议年】:22-24 October, 2008 【会议召开地点】:Okinawa, Japan 附件下载 |
