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Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3
[2011-09-28]
Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4
H. Saitoh, T. Hirose, Y. Hirotsu, Y. Ichinose
Surface and Coatings Technology
Volumes 39-40, Part 1, 1 December 1989, Pages 265-273


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