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High rate deposition of amorphous silicon based solar cells using modified [2010-01-05] |
| High rate deposition of amorphous silicon based solar cells using modified very high frequency glow discharge Yue, Guozhen (United Solar Ovonic LLC, 1100 West Maple Road, Troy, MI 48084); Yan, Baojie; Yang, Jeffrey; Guha, Subhendu Source: Materials Research Society Symposium Proceedings, v 989, A15-04 p 359-364, 2007, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2007 附件下载 |
