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Single-source chemical vapor deposition of SiC films in a large-scale low-p [2010-01-07] |
| Single-source chemical vapor deposition of SiC films in a large-scale low-pressure CVD growth, chemical, and mechanical characterization reactor 作者: Roper, CS; Radmilovic, V; Howe, RT, et al. 来源出版物: JOURNAL OF THE ELECTROCHEMICAL SOCIETY 卷: 153 期: 8 页: C562- C566 出版年: 2006 附件下载 |
