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Solid Internal Energy Dissipation of 3C Single-Crystal Silicon Carbide Micr
[2010-04-18]
Title: Solid Internal Energy Dissipation of 3C Single-Crystal Silicon Carbide Micromechanical Resonators by Heterojunction Growth on Silicon
Authors: Chang, WT
Author Full Names: Chang, Wenteng
Source: SENSORS AND MATERIALS 22 (2): 71-83 2010

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