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MOEMS pressure sensors for propulsion applications [2009-08-05] |
| 标题: MOEMS pressure sensors for propulsion applications 作者: Boyd, JT; Dasgupta, S; Jackson, HE 会议信息: Conference on MOEMS and Miniaturized Systems, 日期: SEP 18-20, 2000 SANTA CLARA CA 来源出版物: MOEMS AND MINIATURIZED SYSTEMS 丛书: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) 卷: 4178 页: 380-386 出版年: 2000 附件下载 |
