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Fabrication of Deep Si Trenches by Self-Assembled Wet Chemical Etching Proc [2011-12-20] |
Fabrication of Deep Si Trenches by Self-Assembled Wet Chemical Etching Process
J. Electrochem. Soc., Volume 157, Issue 9, pp. D496-D499 (2010)
(Published 16 July 2010)
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