A low-cost polysilicon process based on the synthesis and decomposition of dichlorosilane
作者: McCormick J.R.; Plahutnik F.; Sawyer D.; 等.
会议名称: Conference Record of the Sixteenth IEEE Photovoltaic Specialists Conference - 1982 会议地点: San Diego, CA, USA 会议日期: 27-30 Sept. 1982
来源出版物: Conference Record of the Sixteenth IEEE Photovoltaic Specialists Conference - 1982 页: 57-62 出版年: 01 1982