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Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy Photoresist [2011-06-22] |
Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy Photoresist
Santeri Tuomikoski and Sami Franssila
2004 Phys. Scr. 2004 223 doi: 10.1088/0031-8949/2004/T114/056
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