Effects of misfit dislocation and film-thickness on the residual stresses in epitaxial thin film systems: Experimental analysis and modeling Article author queryliu m [Google Scholar]ruan h [Google Scholar]zhang l [Google Scholar]moridi a [Google Scholar]
Mei Liua1, Haihui Ruana1, Liangchi Zhanga1 c1 and Alireza Moridia1
Journal of Materials ResearchJournal of Materials Research / Volume 27 / Issue 21 / 2012, pp 2737-2745