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Single-Step RIE Fabrication Process of Low Loss InP Waveguide Using CH4 ∕ H
[2012-10-16]
Single-Step RIE Fabrication Process of Low Loss InP Waveguide Using CH4 ∕ H2 Chemistry

   Journal of The Electrochemical Society.  2011 158(3): H281-H284; doi:10.1149/1.3532767


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