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MICROMACHINED FABRY-PEROT-INTERFEROMETER WITH CORRUGATED SILICON DIAPHRAGM [2009-08-10] |
| 标题: MICROMACHINED FABRY-PEROT-INTERFEROMETER WITH CORRUGATED SILICON DIAPHRAGM FOR FIBER OPTIC SENSING APPLICATIONS 作者: MENDEZ, A; MORSE, TF; RAMSEY, KA 会议信息: 1ST CONF ON INTEGRATED OPTICS AND MICROSTRUCTURES, AT THE SPIES OE / FIBERS SYMP, 日期: SEP 08-09, 1992 BOSTON MA 来源出版物: INTEGRATED OPTICS AND MICROSTRUCTURES 丛书: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) 卷: 1793 页: 170-182 出版年: 1993 附件下载 |
