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LASER ANNEALING OF ION-IMPLANTED SEMICONDUCTORS [2012-05-22] |
LASER ANNEALING OF ION-IMPLANTED SEMICONDUCTORS
WHITE, CW (WHITE, CW); NARAYAN, J (NARAYAN, J); YOUNG, RT (YOUNG, RT)
SCIENCE 卷: 204 期: 4392 页: 461-468 DOI: 10.1126/science.204.4392.461 出版年: 1979
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