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On the microstructure-property relationship of WTi(N) diffusion barriers [2011-06-22] |
题目：On the microstructure-property relationship of WTi(N) diffusion barriers
作者： A.G. Dirks, R.A.M. Wolters，and A.J.M. Nellissen
来源：Thin Solid Films ，Volumes 193-194, Part 1, 1990, Pages 201-210
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