Title: CURRENT CONDUCTION MECHANISMS OF ATOMIC-LAYER-DEPOSITED Al2O3/NITRIDED SiO2 STACKING GATE OXIDE ON 4H-SiC
International Journal of Modern Physics B (IJMPB)
Volume: 24, Issue: 27(2010) pp. 5371-5378     DOI: 10.1142/S0217979210055925